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Applied MaterialsPatent grant

Applied Materials was granted a patent for detecting arcs in plasma chambers.

What happened

In October 2026 Applied Materials patented visible-light arc detection for semiconductor manufacturing equipment, helping locate faults and shut down affected power sources.

Source

patents.google.comOct 13, 2026

US patent US12763300

Methods for detecting arcing in power delivery systems for process chambers

Abstract

Methods for detecting arcs in power delivery systems for plasma process chambers leverage visible arc detection sensors to facilitate in locating the arc and shutting down a power source associated with arc location. In some embodiments, the method includes receiving an arc indication from an arc detection sensor operating in a visible light spectrum where the at least one arc detection sensor is positioned in an assembly of a power delivery system for a plasma process chamber, determining a location of the arc indication by an arc detection controller of the plasma process chamber, and activating a safety interlock signal to the power source of the power delivery system of the plasma process chamber when the at least one arc indication exceeds a threshold value. The safety interlock signal controls a power status of the power source and activating the safety interlock signal removes power source power.

patents.google.com/patent/US12763300Read the full source

Extracted by Autobound

From the Signal API record
Signal
Patent grant

What this signalsA new patent often shows where a company is putting its R&D budget.

Grant date
Oct 13, 2026
Inventors
Yang Yang, Kartik Ramaswamy
Patent number
US12763300
Assignee
APPLIED MATERIALS, INC.

The full record

From the Signal API record

People

  • Yue GuoInventor
  • Yang YangInventor
  • Kartik RamaswamyInventor

Details

Primary CPC class
H01J 37/32944
USPTO assignee
APPLIED MATERIALS, INC.
What the invention does
A safety system that uses visible-light sensors to spot electrical arcs inside plasma-processing equipment and turn off power near the fault.

Topics and mentions

Tags

  • Intellectual Property
  • Research & Development
  • Manufacturing Operations
  • Safety

Technologies named

  • plasma processing
  • arc detection
  • semiconductor manufacturing

Extraction

Detected
Oct 14, 2026
signal_type
patents-company
signal_subtype
patentGrant

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This page shows a preview. The full patents-company record in the Signal API and MCP can also have these 8 fields. Some fields are empty for some signals.

Company

  • linkedin_urlValue in the API
  • industriesValue in the API
  • employee_count_lowValue in the API
  • employee_count_highValue in the API
  • revenueValue in the API
  • descriptionValue in the API

Signal

  • signal_nameValue in the API
  • associationValue in the API
Show the full JSONThe record on this page and the API request

GET /v1/signals/08742b60-31c3-5712-9138-8c1dcdb4880b returns this record as JSON. POST /v1/companies/enrich returns every signal for appliedmaterials.com.

{
  "signal_id": "08742b60-31c3-5712-9138-8c1dcdb4880b",
  "signal_type": "patents-company",
  "signal_subtype": "patentGrant",
  "detected_at": "2026-10-14T16:04:09+00:00",
  "company": {
    "name": "Applied Materials",
    "domain": "appliedmaterials.com"
  },
  "data": {
    "cpc": [
      {
        "code": "H01J 37/32944"
      },
      {
        "code": "H01J 37/32082"
      },
      {
        "code": "H01J 2237/0206"
      }
    ],
    "tags": [
      "Intellectual Property",
      "Research & Development",
      "Manufacturing Operations",
      "Safety"
    ],
    "detail": "In October 2026 Applied Materials patented visible-light arc detection for semiconductor manufacturing equipment, helping locate faults and shut down affected power sources.",
    "summary": "Applied Materials was granted a patent for detecting arcs in plasma chambers.",
    "event_at": "2026-10-13",
    "inventors": [
      {
        "name": "Yue Guo",
        "status": "unresolved",
        "is_primary": true
      },
      {
        "name": "Yang Yang",
        "status": "unresolved",
        "is_primary": false
      },
      {
        "name": "Kartik Ramaswamy",
        "status": "unresolved",
        "is_primary": false
      }
    ],
    "event_kind": "grant_date",
    "grant_date": "2026-10-13",
    "source_url": "https://patents.google.com/patent/US12763300",
    "cpc_primary": {
      "code": "H01J 37/32944"
    },
    "patent_title": "Methods for detecting arcing in power delivery systems for process chambers",
    "patent_number": "US12763300",
    "uspto_assignee": "APPLIED MATERIALS, INC.",
    "patent_abstract": "Methods for detecting arcs in power delivery systems for plasma process chambers leverage visible arc detection sensors to facilitate in locating the arc and shutting down a power source associated with arc location. In some embodiments, the method includes receiving an arc indication from an arc detection sensor operating in a visible light spectrum where the at least one arc detection sensor is positioned in an assembly of a power delivery system for a plasma process chamber, determining a location of the arc indication by an arc detection controller of the plasma process chamber, and activating a safety interlock signal to the power source of the power delivery system of the plasma process chamber when the at least one arc indication exceeds a threshold value. The safety interlock signal controls a power status of the power source and activating the safety interlock signal removes power source power.",
    "precision_class": "structural",
    "invention_explanation": "A safety system that uses visible-light sensors to spot electrical arcs inside plasma-processing equipment and turn off power near the fault.",
    "technologies_mentioned": [
      "plasma processing",
      "arc detection",
      "semiconductor manufacturing"
    ]
  }
}

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