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KLAPatent grant

KLA was granted a patent for in-situ vacuum contamination measurement.

What happened

In September 2026 KLA patented a contamination-monitoring system for semiconductor manufacturing chambers, helping identify residue without taking equipment offline.

Source

Abstract

The system includes a primary vacuum chamber and a secondary vacuum chamber connected to the primary vacuum chamber via a gate valve. The gate valve operates between an open position in which the secondary vacuum chamber is in fluid communication with the primary vacuum chamber and a closed position in which the secondary vacuum chamber is sealed from the primary vacuum chamber. A heat exchanger cools the secondary vacuum chamber to adsorb contaminants from the primary vacuum chamber into the secondary vacuum chamber when the gate valve is in the open position. A gas source injects a carrier gas into the secondary vacuum chamber when the gate valve is in the closed position. The heat exchanger also heats the carrier gas in the secondary vacuum chamber to desorb the contaminants into a gas sample with the carrier gas. A sample container collects the gas sample from the secondary vacuum chamber.

patents.google.com/patent/US12751233Read the full source

Extracted by Autobound

From the Signal API record
Signal
Patent grant

What this signalsA new patent often shows where a company is putting its R&D budget.

Grant date
Sep 29, 2026
Inventors
Santosh Kumar Sankar, Makfir Sefa
Patent number
US12751233
Assignee
KLA Corporation

The full record

From the Signal API record

People

  • Santosh Kumar SankarInventor
  • Makfir SefaInventor

Details

Primary CPC class
H10P 72/0402
USPTO assignee
KLA Corporation
What the invention does
A connected chamber is cooled to trap contaminants from the main vacuum chamber, then isolated so the captured material can be measured and identified.

Topics and mentions

Tags

  • Intellectual Property
  • Research & Development
  • Manufacturing Operations
  • Quality Assurance

Technologies named

  • vacuum systems
  • contamination monitoring
  • semiconductor manufacturing

Extraction

Detected
Sep 30, 2026
signal_type
patents-company
signal_subtype
patentGrant

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This page shows a preview. The full patents-company record in the Signal API and MCP can also have these 8 fields. Some fields are empty for some signals.

Company

  • linkedin_urlValue in the API
  • industriesValue in the API
  • employee_count_lowValue in the API
  • employee_count_highValue in the API
  • revenueValue in the API
  • descriptionValue in the API

Signal

  • signal_nameValue in the API
  • associationValue in the API
Show the full JSONThe record on this page and the API request

GET /v1/signals/8ed442e3-a7b9-5009-ac8c-6fc4808b6714 returns this record as JSON. POST /v1/companies/enrich returns every signal for kla.com.

{
  "signal_id": "8ed442e3-a7b9-5009-ac8c-6fc4808b6714",
  "signal_type": "patents-company",
  "signal_subtype": "patentGrant",
  "detected_at": "2026-09-30T17:48:17+00:00",
  "company": {
    "name": "KLA",
    "domain": "kla.com"
  },
  "data": {
    "cpc": [
      {
        "code": "H10P 72/0402"
      },
      {
        "code": "H10P 72/0604"
      }
    ],
    "tags": [
      "Intellectual Property",
      "Research & Development",
      "Manufacturing Operations",
      "Quality Assurance"
    ],
    "detail": "In September 2026 KLA patented a contamination-monitoring system for semiconductor manufacturing chambers, helping identify residue without taking equipment offline.",
    "summary": "KLA was granted a patent for in-situ vacuum contamination measurement.",
    "event_at": "2026-09-29",
    "inventors": [
      {
        "name": "Santosh Kumar Sankar",
        "status": "unresolved",
        "is_primary": true
      },
      {
        "name": "Makfir Sefa",
        "status": "resolved",
        "is_primary": false,
        "linkedin_url": "https://www.linkedin.com/in/makfir-sefa"
      }
    ],
    "event_kind": "grant_date",
    "grant_date": "2026-09-29",
    "source_url": "https://patents.google.com/patent/US12751233",
    "cpc_primary": {
      "code": "H10P 72/0402"
    },
    "patent_title": "Method to perform in-situ vacuum contamination measurement and identification in arbitrarily large chambers",
    "patent_number": "US12751233",
    "uspto_assignee": "KLA Corporation",
    "patent_abstract": "The system includes a primary vacuum chamber and a secondary vacuum chamber connected to the primary vacuum chamber via a gate valve. The gate valve operates between an open position in which the secondary vacuum chamber is in fluid communication with the primary vacuum chamber and a closed position in which the secondary vacuum chamber is sealed from the primary vacuum chamber. A heat exchanger cools the secondary vacuum chamber to adsorb contaminants from the primary vacuum chamber into the secondary vacuum chamber when the gate valve is in the open position. A gas source injects a carrier gas into the secondary vacuum chamber when the gate valve is in the closed position. The heat exchanger also heats the carrier gas in the secondary vacuum chamber to desorb the contaminants into a gas sample with the carrier gas. A sample container collects the gas sample from the secondary vacuum chamber.",
    "precision_class": "structural",
    "invention_explanation": "A connected chamber is cooled to trap contaminants from the main vacuum chamber, then isolated so the captured material can be measured and identified.",
    "technologies_mentioned": [
      "vacuum systems",
      "contamination monitoring",
      "semiconductor manufacturing"
    ]
  }
}

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