Abstract
A semiconductor device includes a substrate having a first active region and a second active region; a first ion implantation region in the first active region of the substrate; a first plug structure over the first active region to be vertically aligned with the first ion implantation region; a second ion implantation region in the second active region of the substrate; and a second plug structure over the second active region to be vertically aligned with the second ion implantation region. The first ion implantation region includes a first outer ion implantation region and a first inner ion implantation region. The first outer ion implantation region surrounds at least one surface of the first inner ion implantation region. The first outer ion implantation region includes at least one of carbon (C) ions and fluorine (F) ions. The first inner ion implantation region includes at least one of germanium (Ge) ions and boron (B) ions.