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Applied MaterialsPatent grant

Applied Materials was granted a patent for multi-target chip-process analysis.

What happened

In September 2026 Applied Materials patented in-chamber measurement technology for monitoring semiconductor fabrication across differently shaped test features during processing.

Source

Abstract

A system can provide in-situ analysis of at least some of a plurality of targets simultaneously during a fabrication process. The system can include a semiconductor processing tool having a chamber. The system can also include a sample arranged within the chamber, the sample having the plurality of targets with different feature orientations and/or feature geometries. The semiconductor processing tool can be configured to perform the fabrication process on the sample. Additionally, the system can include a metrology tool integrated with the semiconductor processing tool. The metrology tool can provide the in-situ analysis of at least some of the plurality of targets simultaneously during the fabrication process.

patents.google.com/patent/US12751240Read the full source

Extracted by Autobound

From the Signal API record
Signal
Patent grant

What this signalsA new patent often shows where a company is putting its R&D budget.

Grant date
Sep 29, 2026
Inventors
Yudong Hao, Todd J. Egan
Patent number
US12751240
Assignee
Applied Materials

The full record

From the Signal API record

People

  • Yudong HaoInventor
  • Todd J. EganInventor

Details

Primary CPC class
H10P 72/0612
USPTO assignee
Applied Materials
What the invention does
A setup that places multiple differently shaped test targets inside a processing chamber so several aspects of chip fabrication can be measured at once.

Topics and mentions

Tags

  • Intellectual Property
  • Research & Development
  • Manufacturing Operations
  • Quality Assurance

Technologies named

  • semiconductor fabrication
  • in-situ metrology
  • process monitoring
  • feature geometry

Extraction

Detected
Sep 30, 2026
signal_type
patents-company
signal_subtype
patentGrant

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This page shows a preview. The full patents-company record in the Signal API and MCP can also have these 8 fields. Some fields are empty for some signals.

Company

  • linkedin_urlValue in the API
  • industriesValue in the API
  • employee_count_lowValue in the API
  • employee_count_highValue in the API
  • revenueValue in the API
  • descriptionValue in the API

Signal

  • signal_nameValue in the API
  • associationValue in the API
Show the full JSONThe record on this page and the API request

GET /v1/signals/20d35cfd-bb38-54fe-82e3-8391eedfb080 returns this record as JSON. POST /v1/companies/enrich returns every signal for appliedmaterials.com.

{
  "signal_id": "20d35cfd-bb38-54fe-82e3-8391eedfb080",
  "signal_type": "patents-company",
  "signal_subtype": "patentGrant",
  "detected_at": "2026-09-30T17:48:17+00:00",
  "company": {
    "name": "Applied Materials",
    "domain": "appliedmaterials.com"
  },
  "data": {
    "cpc": [
      {
        "code": "H10P 72/0612"
      },
      {
        "code": "G01B 11/00"
      },
      {
        "code": "G05B 19/41875"
      },
      {
        "code": "G01B 2210/56"
      },
      {
        "code": "G05B 2219/32368"
      }
    ],
    "tags": [
      "Intellectual Property",
      "Research & Development",
      "Manufacturing Operations",
      "Quality Assurance"
    ],
    "detail": "In September 2026 Applied Materials patented in-chamber measurement technology for monitoring semiconductor fabrication across differently shaped test features during processing.",
    "summary": "Applied Materials was granted a patent for multi-target chip-process analysis.",
    "event_at": "2026-09-29",
    "inventors": [
      {
        "name": "Yudong Hao",
        "status": "resolved",
        "is_primary": true,
        "linkedin_url": "https://www.linkedin.com/in/yudong-hao-9a520911"
      },
      {
        "name": "Todd J. Egan",
        "status": "resolved",
        "is_primary": false,
        "linkedin_url": "https://www.linkedin.com/in/todd-egan-009571"
      }
    ],
    "event_kind": "grant_date",
    "grant_date": "2026-09-29",
    "source_url": "https://patents.google.com/patent/US12751240",
    "cpc_primary": {
      "code": "H10P 72/0612"
    },
    "patent_title": "Multi-target design for in-situ analysis of semiconductor fabrication process",
    "patent_number": "US12751240",
    "uspto_assignee": "Applied Materials",
    "patent_abstract": "A system can provide in-situ analysis of at least some of a plurality of targets simultaneously during a fabrication process. The system can include a semiconductor processing tool having a chamber. The system can also include a sample arranged within the chamber, the sample having the plurality of targets with different feature orientations and/or feature geometries. The semiconductor processing tool can be configured to perform the fabrication process on the sample. Additionally, the system can include a metrology tool integrated with the semiconductor processing tool. The metrology tool can provide the in-situ analysis of at least some of the plurality of targets simultaneously during the fabrication process.",
    "precision_class": "structural",
    "invention_explanation": "A setup that places multiple differently shaped test targets inside a processing chamber so several aspects of chip fabrication can be measured at once.",
    "technologies_mentioned": [
      "semiconductor fabrication",
      "in-situ metrology",
      "process monitoring",
      "feature geometry"
    ]
  }
}

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