US patent US12751283
Metal-insulator-metal structures and methods of forming the same
Abstract
Forming a barrier layer and removing the barrier layer from an upper portion of a recess in which a metal-insulator-metal (MIM) structure will be formed allows for forming the MIM structure with fewer voids, which improves capacitance of the MIM structure. For example, a bottom layer anti-reflective coating may be deposited and etched back in order to allow for removal of the barrier layer from the upper portion of the recess but not from a bottom portion of the recess. Additionally, the barrier layer may be formed using physical vapor deposition, which reduces carbon impurities in the barrier layer as compared with using atomic layer deposition, which improves resistance for the MIM structure.