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TSMCPatent grant

TSMC was granted a patent for improved metal-insulator-metal structures.

What happened

In September 2026 TSMC patented a semiconductor fabrication process for producing higher-capacitance MIM structures with fewer voids in integrated circuits.

Source

patents.google.comSep 29, 2026

US patent US12751283

Metal-insulator-metal structures and methods of forming the same

Abstract

Forming a barrier layer and removing the barrier layer from an upper portion of a recess in which a metal-insulator-metal (MIM) structure will be formed allows for forming the MIM structure with fewer voids, which improves capacitance of the MIM structure. For example, a bottom layer anti-reflective coating may be deposited and etched back in order to allow for removal of the barrier layer from the upper portion of the recess but not from a bottom portion of the recess. Additionally, the barrier layer may be formed using physical vapor deposition, which reduces carbon impurities in the barrier layer as compared with using atomic layer deposition, which improves resistance for the MIM structure.

patents.google.com/patent/US12751283Read the full source

Extracted by Autobound

From the Signal API record
Signal
Patent grant

What this signalsA new patent often shows where a company is putting its R&D budget.

Grant date
Sep 29, 2026
Inventors
Chung-Liang Cheng, Sheng-Chau Chen
Patent number
US12751283
Assignee
Taiwan Semiconductor Manufacturing Company, Ltd.

The full record

From the Signal API record

People

  • Chung-Liang ChengInventor
  • Sheng-Chau ChenInventor

Details

Primary CPC class
H10W 20/496
USPTO assignee
Taiwan Semiconductor Manufacturing Company, Ltd.
What the invention does
A manufacturing method that selectively removes a barrier layer near the top of a tiny recess so the finished capacitor fills more completely and performs better.

Topics and mentions

Tags

  • Intellectual Property
  • Research & Development
  • Engineering
  • Manufacturing Operations

Technologies named

  • semiconductor fabrication
  • MIM capacitors
  • thin-film deposition
  • etching

Extraction

Detected
Sep 30, 2026
signal_type
patents-company
signal_subtype
patentGrant

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This page shows a preview. The full patents-company record in the Signal API and MCP can also have these 8 fields. Some fields are empty for some signals.

Company

  • linkedin_urlValue in the API
  • industriesValue in the API
  • employee_count_lowValue in the API
  • employee_count_highValue in the API
  • revenueValue in the API
  • descriptionValue in the API

Signal

  • signal_nameValue in the API
  • associationValue in the API
Show the full JSONThe record on this page and the API request

GET /v1/signals/0f72c73c-4e36-5e6e-b063-a5b9023424e6 returns this record as JSON. POST /v1/companies/enrich returns every signal for tsmc.com.

{
  "signal_id": "0f72c73c-4e36-5e6e-b063-a5b9023424e6",
  "signal_type": "patents-company",
  "signal_subtype": "patentGrant",
  "detected_at": "2026-09-30T17:48:42+00:00",
  "company": {
    "name": "TSMC",
    "domain": "tsmc.com"
  },
  "data": {
    "cpc": [
      {
        "code": "H10W 20/496"
      },
      {
        "code": "H10D 1/042",
        "label": "Inorganic electric semiconductor devices (2025 CPC reorg of parts of H01L)"
      },
      {
        "code": "H10D 1/716",
        "label": "Inorganic electric semiconductor devices (2025 CPC reorg of parts of H01L)"
      },
      {
        "code": "H10W 20/033"
      },
      {
        "code": "H10W 20/048"
      }
    ],
    "tags": [
      "Intellectual Property",
      "Research & Development",
      "Engineering",
      "Manufacturing Operations"
    ],
    "detail": "In September 2026 TSMC patented a semiconductor fabrication process for producing higher-capacitance MIM structures with fewer voids in integrated circuits.",
    "summary": "TSMC was granted a patent for improved metal-insulator-metal structures.",
    "event_at": "2026-09-29",
    "inventors": [
      {
        "name": "Chung-Liang Cheng",
        "status": "unresolved",
        "is_primary": true
      },
      {
        "name": "Sheng-Chau Chen",
        "status": "unresolved",
        "is_primary": false
      }
    ],
    "event_kind": "grant_date",
    "grant_date": "2026-09-29",
    "source_url": "https://patents.google.com/patent/US12751283",
    "cpc_primary": {
      "code": "H10W 20/496"
    },
    "patent_title": "Metal-insulator-metal structures and methods of forming the same",
    "patent_number": "US12751283",
    "uspto_assignee": "Taiwan Semiconductor Manufacturing Company, Ltd.",
    "patent_abstract": "Forming a barrier layer and removing the barrier layer from an upper portion of a recess in which a metal-insulator-metal (MIM) structure will be formed allows for forming the MIM structure with fewer voids, which improves capacitance of the MIM structure. For example, a bottom layer anti-reflective coating may be deposited and etched back in order to allow for removal of the barrier layer from the upper portion of the recess but not from a bottom portion of the recess. Additionally, the barrier layer may be formed using physical vapor deposition, which reduces carbon impurities in the barrier layer as compared with using atomic layer deposition, which improves resistance for the MIM structure.",
    "precision_class": "structural",
    "invention_explanation": "A manufacturing method that selectively removes a barrier layer near the top of a tiny recess so the finished capacitor fills more completely and performs better.",
    "technologies_mentioned": [
      "semiconductor fabrication",
      "MIM capacitors",
      "thin-film deposition",
      "etching"
    ]
  }
}

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